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The Laser Beam Recorder has been designed to meet the stringent
requirements posed by
BD in particular. Modern modelling technologies and innovative
design have resulted in an exceptionally stable LBR. All movements
in the LBR support mastering at high speeds (>2R) when encoders
become available. Especially the newly developed Learning Feed Forward
Control (LFFC) makes this possible. 2 The Sputtering Unit was specially designed to perform two tasks; preparing the substrate for recording and finishing the substrate after development, so it can subsequently be used in galvanics. The first step consists of sputtering a base silicon layer, followed by the PTM layer. The layer thickness variation is less than 2nm over the program area of the disc. 3 The wet station combines the functions of cleaning, development and reflection / diffraction (DOM) measurement. After recording of the disc, the wet station develops the substrate based on order criterion. |
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The Warehouse, having 100 storage locations for substrates,
plays a vital role in having the CrystalLine achieve its maximum
throughput. The warehouse also makes it possible to run unattended mastering for 12 hours or more. 5 The Handler, selected for reliability and speed, can reach all process locations in a short time. Handling time between process steps is no longer a delaying factor in the throughput of the machine. 6 The Intake accepts cartridges holding 20 substrates. 7 The Unload delivers the finished masters each in a dedicated box. It also offers the possibility to load a single substrate for processing or measuring in the CrystalLine. The substrate used in the machine has an industry-wide accepted diameter of 180 mm. The polished glass disc, combined with a hub, guaranties optimum quality while maintaining easy handling and fixation on the stations throughout the machine. |
